CA-100A (Alumina) Micro Gear
10 μm
Optical resolution
130 μm
Cutting-edge
90 μm
Spacing
3D Bow-Knot Array
2 μm
Optical accuracy
40 μm
Characteristic dimensions
Micro-dome hierarchical structure
2 μm
Optical resolution
28 μm
minimum diameter
Micro-dome hierarchical structure
The single dome is 290 μm in width and 480 μm in height; the secondary micro-columns have a diameter of 28 μm and a height of 70 μm. By using a printing micro-dome hierarchical structure mold and combining with a mold flip process, flexible pressure sensors can be fabricated.
2 μm
Optical resolution
28 μm
minimum diameter