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Micromechanics

The micro mechatronics field involves designing and manufacturing mechatronic devices with dimensions ranging from 1 micrometer to 1 mm. As the micro world scales, micro mechatronics integrates both mechanical and electronic systems. Consumer products that include electronics typically contain a micro mechatronics system as part of the mechanical system.

Application Cases

CA-100A (Alumina) Micro Gear

  • 10 μm

    Optical resolution

  • 130 μm

    Cutting-edge

  • 90 μm

    Spacing

CA-100A (Alumina) Micro Gear

PμSL technology supports the printing of CA-100A (alumina) ceramic slurry for the fabrication of high-precision ceramic prototypes, with a gear tooth tip of 130 μm and a gear pitch of 90 μm.

  • 10 μm

    Optical resolution

  • 130 μm

    Cutting-edge

  • 90 μm

    Spacing

3D Bow-Knot Array

  • 2 μm

    Optical accuracy

  • 40 μm

    Characteristic dimensions

3D Bow-Knot Array

With overall dimensions of 5 × 5 × 0.5 mm³, it can be coated with a Weyl semimetal film in order to produce a terahertz detector with high sensitivity and a large effective detection area.

  • 2 μm

    Optical accuracy

  • 40 μm

    Characteristic dimensions

Micro-dome hierarchical structure

  • 2 μm

    Optical resolution

  • 28 μm

    minimum diameter

Micro-dome hierarchical structure

The single dome is 290 μm in width and 480 μm in height; the secondary micro-columns have a diameter of 28 μm and a height of 70 μm. By using a printing micro-dome hierarchical structure mold and combining with a mold flip process, flexible pressure sensors can be fabricated.

  • 2 μm

    Optical resolution

  • 28 μm

    minimum diameter

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